The system can grow areas up to 25 mm × 75 mm using an iron catalyst deposited by the Fredrick electron beam deposition system. Gases used ... be considered a dirty furnace as it has been used for a ...

These include chemical vapor deposition (CVD), physical vapor deposition (PVD), ion implantation, plasma etching or cleaning, rapid thermal processing (RTP), and vacuum annealing. In chemical vapor ...