干式真空泵 - 百度百科
干式螺杆真空泵，是利用一对螺杆，在泵壳中作同步高速反向旋转而产生的吸气和排气作用的 抽气设备，两螺杆经精细 动平衡 校正，由轴承支撑，安装在泵壳中，螺杆与螺杆之间都有一定的间隙，因此泵工作时，相互之间无磨擦，运转平稳，噪音低， 工作腔 无需润滑油，因此，干式 螺杆泵 能抽除含有大量 水蒸汽 及少量粉尘的气体场合，极限真空更高，消耗功率更低，具有节能，免维修等优点。 它是油封式/水环式/喷射式真空泵的更新换代产品。 靠活塞往复运动使泵腔（气 …
罗茨型干泵｜真空泵（高真空）的基础知识｜技术知识｜ULVAC SHOWCASE
罗茨型干泵使用三叶转子，通过单轴连接多段转子，能够压缩、排气至大气压。 有点 可获得清洁真空，从大气压到到达压力均可使用。 该泵的壳体中有两个三叶转子（旋转体），转子通过一对齿轮以相同的周期相反方向旋转。 转子间，以及转子和壳体间不会接触，保持微小的间隙旋转，对气体进行压缩和输送。 转子具有多段结构，压缩至大气压，并排放到大气中。 转子，壳体中不使用油等密封液，因此可以进行清洁排气。 油用于齿轮和轴承的润滑，但设计了密封结构以防止 …
Dry Vacuum Pumps – EBARA Technologies, Inc.
EBARA is a world-leader in the design and manufacture of “dry” vacuum pumps. EBARA dry vacuum pumps provide a host of product advantages including: Increased reliability; Reduced clean room particulate load; Low noise; Low vibration; Lower operating costs; Lowest cost-of-ownership when compared with other dry vacuum pumps on the market today.
真空抽氣技術 - 俊尚科技
冷凍幫浦（cryogenic pump） 冷凍幫浦堪稱是最潔淨的真空抽氣技術，對系統真空潔淨度要求極為嚴苛的應用來說，冷凍幫浦可謂是最佳的選擇。 一般來說，冷凍幫浦的工作壓力約莫介於10 -6 ～ 10 -11 Torr，也就是只能用於分子流的真空環境下運作，因此需要搭配前級 ...
iXM, iXH, iXL - Semiconductor Dry Pumps - Edwards
The iXL series is a range of low energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology. The iXL900R is the fastest loadlock pump currently available in its class for FPD loadlock applications.
IDP-7 无油涡旋式干泵，9.1 m3/h，5.4 CFM | 安捷伦 - Agilent
Dry scroll pumps are an environmentally friendly alternative to rotary vane pumps (RVP) for creating rough vacuum and backing turbo pumps. Unlike oil sealed RVP, scroll pumps use tip seals which eliminate the possibility of hydrocarbon …
How Does A Dry Vacuum Pump Works: An Overview - Vacculex
2023年2月2日 · A dry vacuum pump is a non-contact vacuum pump in which the vacuum chamber is sealed without any fluid. It features oil-free, liquid-free sealing and achieves a clean vacuum without back-flow or diffusion of water and oil.
Dry Vacuum Pump for your Process Applications - Harsh Industrial
2024年10月21日 · What is a Dry Vacuum Pump? The functional area inside the pump (pumping chamber) is dry/oil free and does not use any fluids to create vacuum. This eliminates the risk of process gas contamination and the generation of effluent. Dry pumps also usually offer clear savings in maintenance and running costs compared to wet vacuum pump technologies.
Dry Vacuum Pumps Overview | US Vacuum Pumps
Air-cooled, compact and oil free, dry claw vacuum pumps are increasingly becoming the pump of choice for medium vacuum applications. Designed for long life and ease of maintenance these pumps exhibit modern design features such as corrosion resistance and modular configuration for easy disassembly and repair.
Dry Screw Pumps - Edwards Vacuum
The dry pumping solution is the change from traditional oil sealed pumps to a proven technology for this industry. Edwards, a world leader in dry pump technology, has demonstrated the ability to provide a low-cost, tailored solution to your vacuum application.