Electron microprobe - Wikipedia
An electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA) or electron micro probe analyzer (EMPA), is an analytical tool used to non-destructively determine the chemical composition of small volumes of solid materials.
干货 | 使用电子探针显微分析（EPMA）必备知识 - 知乎
电子探针X射线显微分析仪（Electron Probe X-ray Micro-Analyzer，简写为EPMA或者EMA）简称为电子探针。 作为一种在电子光学和X射线光谱学原理的基础上发展而来的高效率分析仪器，其通过电子束作用于试样微区上而产生的二次电子、 背散射电子 及X射线等信号，进行 ...
电子探针X射线微区分析 - 百度百科
电子探针（Electron Probe Microanalysis-EPMA）的主要功能是进行微区成分分析。 它是在电子光学和X射线光谱学原理的基础上发展起来的一种高效率分析仪器。 其原理是：用细聚焦电子束入射样品表面，激发出样品元素的特征X射线，分析特征X射线的波长（或能量）可知元素种类；分析特征X射线的强度可知元素的含量。 其镜筒部分构造和SEM相同，检测部分使用 X射线谱仪，用来检测X射线的特征波长（波谱仪）和特征能量（能谱仪），以此对微区进行化学成分分析。 [1] …
Electron probe micro-analyzer (EPMA) - Methods
2018年6月15日 · An electron probe micro-analyzer is a microbeam instrument used primarily for the in situ non-destructive chemical analysis of minute solid samples. EPMA is also informally called an electron microprobe, or just probe. It is fundamentally the same as an SEM, with the added capability of chemical analysis.
Electron probe microanalysis: A review of recent developments …
2021年2月1日 · Electron probe microanalysis (EPMA) is a microanalytical technique widely used for the characterization of materials. Since its development in the 1950s, different instrumental and analytical developments have been made with …
Electron Probe Microanalysis | Materials Research Institute
Electron Probe MicroAnalysis (EPMA) is a non-destructive technique to determine chemical composition of small amounts of solid materials. A focused beam of high-energy electrons hits the sample and generates characteristic x-rays corresponding to the elements present in the material.
Electron probe microanalysis (EPMA) is an analytical technique that has stood the test of time. Not only is EPMA able to trace its origins back to the discovery of X-rays at the end of the nineteenth century, but the first commercial instrument appeared over 50 years ago.
This article summarizes the basic principles of electron probe microanalysis, with examples of applications in materials science and geology that illustrate the capabilities of the technique. Electron probe microanalysis (EPMA) is a nondestructive analytical technique widely used for determining the local composition of solid samples [1, 2, 3].
Electron Probe Microanalysis - an overview - ScienceDirect
Electron probe microanalysis (EPMA) is used for quantitative analysis of the elemental composition of solid specimens at a micrometer scale. The method uses bombardment of the specimen by keV electrons to excite characteristic X-rays from the sample, which are then detected by using wavelength-dispersive (WD) spectrometers.
Electron Probe Micro-Analysis - Massachusetts Institute of Technology
The Electron Microprobe, also known as the Electron Probe X-ray Microanalyzer (EMPA), is a powerful and well established analytical tool that provides non-destructive, in-situ and complete quantitative chemical analysis of a flat solid surface with a spatial resolution of ~2 micron through X-ray emission spectrometry.